kw.\*:("Silicon diaphragms")
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The creep behaviour of the microfabricated silicon diaphragms at 900 °CJUAN REN; KINNELL, Peter; GEEAR, Martin et al.Microelectronic engineering. 2010, Vol 87, Num 5-8, pp 1213-1216, issn 0167-9317, 4 p.Conference Paper
